Matthew Hartensveld, PhD
@MattHartensveld
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Posts related to homebrew semiconductor device fabrication and semiconductor news.
Rochester, NY
Joined January 2014
Goodbye wooden table, the sputtering system has officially moved into the lab with a few new upgrades.
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Updated with the raspberry pi touch screen, now I don't need another PC, I just need to shove all the excess cables for the robot in a project box to clean it up
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Basic robotics integration for more repeatable photoresist development on small semiconductor samples. Will move the program over to a touch screen RPi 4 for ease of use.
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Built a micro-scale @GamersNexus logo in my home cleanroom. Fan-made, not affiliated; just for fun.
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Needed DI water for the cleanroom shed, fixed a water polished and built a DIY water station in my basement City water -> Water Softener -> CF/RO system -> resin filter -> elga water polisher = DI water <3 PFA containers to keep it DI and transport to/from shed
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Constructed over the course of a few months in whatever free time I could find. Learned lots of new skills along the way. Key factors are cleanroom grade flooring, epoxy painted walls, positive pressure filter air intake, and lots of airflow with 2 FFUs.
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Sputtering system I built into a wood table haha, working on extruded Al build before I add to the lab
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RIE etching with flourine based gases with modified desktop sputter system.
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Lithography through custom i-line stepper from a modified microscope. Can do dry sub-micron or immersion for down to ~100nm (though with hit to field size)
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Class 100 Cleanroom Shed I Built For Semiconductor R&D :)
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Built a new spin-coater with a custom UI, it makes use of an internal pump for vacuum with just one external cable for power.
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Automation in progress + sub 100nm features?
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New chamber "hat" to make room for the sputter gun
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